Abstract

This document specifies the design and metrological characteristics of confocal microscopy instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document can also be applied to profiling measurements.

Begin

2024-09-23

WI

00290267

Planned document number

DIN EN ISO 25178-607

Project number

15202930

Responsible national committee

NA 152-03-03 AA - Surfaces  

Responsible european committee

CEN/TC 290 - Dimensional and geometrical product specification and verification  

Responsible international committee

ISO/TC 213/WG 16 - Areal and profile surface texture  

previous edition(s)

Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments (ISO 25178-607:2019); German version EN ISO 25178-607:2019
2019-12

Order from DIN Media