Abstract

This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements as well. This document dapplies to focus variation without pattern illumination or with fixed pattern illumination. This document does not cover methods using varying pattern illumination during the measurement.

Begin

2023-10-04

WI

00290263

Planned document number

DIN EN ISO 25178-606

Project number

15202881

Responsible national committee

NA 152-03-03 AA - Surfaces  

Responsible european committee

CEN/TC 290 - Dimensional and geometrical product specification and verification  

Responsible international committee

ISO/TC 213/WG 16 - Areal and profile surface texture  

draft standard

Geometrical product specifications (GPS) - Surface texture: Areal - Part 606: Design and characteristics of non-contact (focus variation) instruments (ISO/DIS 25178-606:2025); German and English version prEN ISO 25178-606:2025
2025-03
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previous edition(s)

Geometrical product specification (GPS) - Surface texture: Areal - Part 606: Nominal characteristics of non-contact (focus variation) instruments (ISO 25178-606:2015); German version EN ISO 25178-606:2015
2016-12

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