Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023); German and English version prEN ISO 25178-604:2023
Abstract
This document describes the design and metrological characteristics of coherence scanning interferometry systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document can be applied to profiling measurements as well.
Begin
2022-10-18
WI
00290256
Planned document number
DIN EN ISO 25178-604
Project number
15202839
Responsible national committee
Responsible european committee
CEN/TC 290 - Dimensional and geometrical product specification and verification
Responsible international committee
ISO/TC 213/WG 16 - Areal and profile surface texture
draft standard
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments (ISO/DIS 25178-604:2023); German and English version prEN ISO 25178-604:2023
2023-11
Order from DIN Media