X-ray spectrometry - X-ray emission- and X-ray fluorescence analysis (XRF) - Part 1: General vocabulary
Abstract
This document provides definitions and basic principles for the X-ray fluorescence analysis of solids and liquids. It does not contain definitions and basic principles relating to the planning of analyses, sample preparation, calibration/evaluation, or consideration of measurement uncertainties. These are dealt with separately in DIN 51418-2. X-ray fluorescence analysis is an analytical method for the identification and quantification of chemical elements contained in a substance, and for the determination of layer thicknesses. For this purpose, the substance is excited to emit element specific radiation whose spectral composition contains this information. The purpose of this document is to harmonize the use of technical terms for the X-ray fluorescence analysis and to achieve their best possible agreement with different fields of optical atomic spectral analysis, i.e. Optical Emission Spectrometry (OES), Atomic Absorption Spectrometry (AAS) and Atomic Fluorescence Spectrometry (AFS).
Begin
2024-02-02
Planned document number
DIN 51418-1
Project number
06235395
Responsible national committee
NA 062-08-15 AA - Basic principles of analytical atomic spectroscopy
