• Hydrogen Technologies Standards form the basic framework for market ramp-up

    More information

  • Climate change Standards and specifications support climate targets

    More information

  • Smart Farming Standards and specifications are drivers for the digitalization of agriculture

    More information
 
Standards [CURRENT]

DIN EN 62047-3
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile-testing (IEC 62047-3:2006); German version EN 62047-3:2006

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung (IEC 62047-3:2006); Deutsche Fassung EN 62047-3:2006

Document: references other documents

Responsible national committee

DKE/K 631 - Halbleiterbauelemente  

Responsible international committee

IEC/TC 47 - Semiconductor devices  

Edition 2007-02
Original language German
Price from 56.60 €
Order from DIN Media
Table of contents

Contact

Elena Rongen

Merianstraße 28
63069 Offenbach am Main

Tel.: +49 69 6308-429

Send message to contact