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Standards [CURRENT]

DIN 32564-3
Production equipment for micro-systems - Terms and definitions - Part 3: Handling, storage and transport

Title (German)

Fertigungsmittel für Mikrosysteme - Begriffe - Teil 3: Handhabung, Lagerung und Transport

Document: references other documents

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems  

Edition 2004-05
Original language German
Price from 42.10 €
Table of contents

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