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Standards [CURRENT]

DIN 50451-8
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 8: Determination of 33 elements in high-purity sulfuric acid by ICP-MS

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 8: Bestimmung von 33 Elementen in hochreiner Schwefelsäure mittels ICP-MS

Responsible national committee

NA 062-02-21 AA - Testing of process materials for semiconductor technology  

Edition 2022-08
Original language German
Price from 56.60 €
Table of contents

Contact

Denise Winter

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2199
Fax: +49 30 2601-42199

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