• Hydrogen Technologies Standards form the basic framework for market ramp-up

    More information
  • Climate change Standards and specifications support climate targets

    More information
  • Smart Farming Standards and specifications are drivers for the digitalization of agriculture

    More information
Standards [CURRENT]

DIN 50450-9
Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C₁-C₃-hydrocarbons in gaseous hydrogen chloride by gaschromatography

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Verunreinigungen in Träger- und Dotiergasen - Teil 9: Bestimmung von Sauerstoff, Stickstoff, Kohlenstoffmonooxid, Kohlenstoffdioxid, Wasserstoff und C₁-C₃-Kohlenwasserstoffen in Chlorwasserstoff mit Gaschromatographie

Responsible national committee

NA 062-05-73 AA - Gas analysis and gas quality  

Edition 2021-07
Original language German
Price from 42.10 €
Table of contents

Contact

Dipl.-Ing.

Florian Rieger

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2598
Fax: +49 30 2601-42598

Send message to contact