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Pre-standard

ISO/TS 21383
Microbeam analysis - Scanning electron microscopy - Qualification of the scanning electron microscope for quantitative measurements

Title (German)

Mikrobereichsanalyse - Rasterelektronenmikroskopie - Qualifizierung des Rasterelektronenmikroskops für quantitative Messungen

Responsible national committee

NA 062-08-18 AA - Electron microscopy and microbeam analysis

Responsible international committee

ISO/TC 202/SC 4 - Scanning electron microscopy

Edition 2021-03

Original language English

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Table of contents

PDF (EN)

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