ISO 22489
Microbeam analysis - Electron probe microanalysis - Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy
Mikrobereichsanalyse - Elektronenstrahl-Mikroanalyse - Quantitative Punktanalyse von Volumenmaterial mittels wellenlängendispersiver Röntgenspektroskopie
Responsible national committee
NA 062-08-18 AA - Electron microscopy and microbeam analysis