DIN IEC/TS 62607-6-4
; DIN SPEC 42607-6-4:2016-01
Nanomanufacturing - Key control characteristics - Part 6-4: Graphene - Conductance measurements using resonant cavity (IEC 113/269/CD:2015)
Nanofertigung - Schlüsselmerkmale - Teil 6-4: Graphen - Messung der Oberflächenleitfähigkeit mittels Hohlraumresonator (IEC 113/269/CD:2015)
Procedure
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Overview
This part of the IEC 62607 series of standards establishes a method for determining the surface conductance of twodimensional (2D) single-layer or multi-layer atomically thin nano-carbon graphene structures. These are synthesized by chemical vapour deposition (CVD), epitaxial growth on silicon carbide (SiC), obtained from reduced graphene oxide (rGO) or mechanically exfoliated from graphite. The measurements are made in an air filled standard R100 rectangular waveguide configuration, at one of the resonant frequency modes, typically at 7 GHz. Surface conductance measurement by resonant cavity involves monitoring the resonant frequency shift and change in the quality factor before and after insertion of the specimen into the cavity in a quantitative correlation with the specimen surface area. This measurement does not explicitly depend on the thickness of the nano-carbon layer. The thickness of the specimen does not need to be known, but it is assumed that the lateral dimension is uniform over the specimen area. The responsible committee is DKE/K 141 "Nanotechnologie" ("Nanotechnology") of the DKE (German Commission for Electrical, Electronic and Information Technologies) at DIN and VDE.