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Draft standard [Withdrawn]

ISO/DIS 13083
Surface chemical analysis - Scanning Probe Microscopy- Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

Title (German)

Chemische Oberflächenanalyse - Rastersondenmikroskopie - Standards zur Definition und Kalibrierung der räumlichen Auflösung von Rasterausbreitungswiderstandsmikroskopie und Rasterkapazitätsmikroskopie

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 9/WG 6 - Use of ESPM  

Edition 2013-03
Original language English
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Table of contents

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