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Technical rule [CURRENT]

ISO/TR 22335
Surface chemical analysis - Depth profiling - Measurement of sputtering rate: mesh-replica method using a mechanical stylus profilometer

Title (German)

Chemische Analytik an Oberflächen - Tiefenprofilanalyse - Messung der Ionenstrahlzerstäubungs-Geschwindigkeit mittels der Gitter-Kopiermethode mit dem mechanischen Stylus Profilometer

Responsible national committee

NA 062-08-16 AA - Surface chemical analysis and scanning probe microscopy  

Responsible international committee

ISO/TC 201/SC 4 - Depth profiling  

Edition 2007-07
Original language English
Price from 106.30 €
Table of contents

Contact

Steffen Jenkel

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

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