Publications of NA 062

Order from DIN Media
DIN 50451-6 2014-11 Standards Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH₄F) and in etching mixtures of high-purity ammonium fluoride solution containing hydrofluoric acid More  Order from DIN Media
DIN 50451-7 2018-04 Standards Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS More  Order from DIN Media
DIN 50451-8 2022-08 Standards Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 8: Determination of 33 elements in high-purity sulfuric acid by ICP-MS More  Order from DIN Media
DIN 50452-1 1995-11 Standards Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particles More  Order from DIN Media
DIN 50452-2 2009-10 Standards Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 2: Determination of particles by optical particle counters More  Order from DIN Media
DIN 50452-3 1995-10 Standards Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 3: Calibration of optical particle counters More  Order from DIN Media
DIN 50453-1 2023-08 Standards Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 1: Silicium monocrystals, gravimetric method More  Order from DIN Media
DIN 50453-2 2023-08 Standards Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 2: Silicon-dioxide coating, optical method More  Order from DIN Media
DIN 50455-1 2009-10 Standards Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods More  Order from DIN Media
DIN 50455-2 1999-11 Standards Testing of materials for semiconductor technology - Methods for the characterisation photoresists - Part 2: Determination of photosensitivity of positive photoresists More  Order from DIN Media

TOP