Projects of NA 062-02-21 AA

DIN 50451-4 2022-10-20 Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS) More  Comment 
DIN 50453-1 2022-10-07 Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 1: Silicium monocrystals, gravimetric method More  Comment 
DIN 50453-2 2022-10-07 Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 2: Silicium-dioxid coating, optical method More  Comment 

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