DIN Standards Committee Technical Fundamentals
DIN 32567-3
Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
Fertigungsmittel für Mikrosysteme - Ermittlung von Materialeinflüssen auf die optische und taktile dimensionelle Messtechnik - Teil 3: Ableitung von Korrekturwerten für taktile Messgeräte
Overview
This document has been prepared by Working Committee NA 027-03-03 AA "Fertigungsmittel für Mikrosysteme" ("Production equipment for microsystems") at DIN Standards Committee Optics and Precision Mechanics (NAFuO). The aim of this standard is to recommend a method for determining and correcting systematic deviations in tactile topographical coating thickness measurement in cases where the layer and substrate have different mechanical properties. The standard describes methods for determining and correcting these systematic deviations for contact (stylus) instruments. The standard can also be applied to scanning coordinate measuring machines with tactile sensors and atomic force microscopes in "contact mode". The standard is primarily aimed at material combinations of soft, flexible layers on hard, rigid substrates. The most important prerequisite for the application of the standard is the possibility of topographic layer thickness measurement, that means the layer must be measurable as a profile step. The standard can be applied to tactile coating thickness measurement of any workpiece.
