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NA 152

DIN Standards Committee Technical Fundamentals

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Technical rule [CURRENT]

VDI/VDE 2655 Blatt 1.3
Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

Title (German)

Optische Messtechnik an Mikrotopografien - Kalibrieren von flächenhaft messenden Interferometern und Interferenzmikroskopen für die Formmessung

Edition 2020-02

Original language German , English

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Table of contents

PDF (DE,EN)

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Terminology

DIN Standards Committee Technical Fundamentals

VDI/VDE 2655 Blatt 1.3 Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

VDI/VDE 2655 Blatt 1.3
Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement