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DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

About DKE Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [CURRENT]

IEC 62047-3
Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung

Edition 2006-08

Original language English , French

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Terminology

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

IEC 62047-3 Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing

IEC 62047-3
Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing