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DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

Standards [CURRENT]

DIN EN 62047-26
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures (IEC 62047-26:2016); German version EN 62047-26:2016

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 26: Beschreibung und Messverfahren für Mikro-Rillen und Nadelstrukturen (IEC 62047-26:2016); Deutsche Fassung EN 62047-26:2016

Document: references other documents

Responsible national committee

DKE/K 631 - Halbleiterbauelemente 

Edition 2016-12
Original language German
Price from 108.80 €
Table of contents

Contact

Stipe Mandic

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63069 Offenbach am Main

Tel.: +49 69 6308-573

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