NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Project
Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile
Abstract
This part of IEC 62047 specifies the requirements and testing method to measure the tensile strength of microstructures which are fabricated by micromachining technology used in silicon based micro-electromechanical system (MEMS). This document is applicable to the in-situ tensile strength measurement of microstructures manufactured by microelectronic technology process and other micromachining technology.
Begin
2026-07-09
Planned document number
DIN EN IEC 62047-54
Project number
02233993
