DIN 50451-4
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 4: Bestimmung von 34 Elementen in hochreinem Wasser durch Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS)
Overview
This document specifies a test method for determining the mass fractions of 34 elements in the extreme trace range in ultrapure water, using inductively coupled plasma mass spectrometry (ICP-MS) as the determination method. The method applies to elemental trace mass fractions from 10 ng/kg to 1 000 ng/kg. This document has been prepared by Working Committee NA 062-02-21 AA "Prüfung von Prozesschemikalien für die Halbleitertechnologie" ("Testing of process materials for semiconductor technology") at DIN Standards Committee Materials Testing (NMP).
Document: references other documents
Responsible national committee
NA 062-02-21 AA - Testing of process materials for semiconductor technology
