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Technical rule [Pre-order]

IEC/TR 63258
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Title (German)

Nanotechnologien - Ein Leitfaden zur Bestimmung der Dicke nanoskaliger Filme mit Hilfe von Ellipsometrie

Responsible national committee

DKE/K 141 - Nanotechnologie

Responsible international committee

ISO/TC 229/JWG 2 - Measurement and characterization

Edition 2021-03

Original language English

Price from 49.30 €

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