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Technical rule [CURRENT]

IEC/TR 63258
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Title (German)

Nanotechnoogien - Ein Leitfaden zur Bestimmung der Dicke nanoskaliger Filme mit Hilfe von Ellipsometrie

Responsible national committee

DKE/K 141 - Nanotechnologie

Responsible international committee

ISO/TC 229/JWG 2 - Joint ISO/TC 229 - IEC/TC 113 WG :Measurement and characterization

Edition 2021-03

Original language English

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Table of contents

PDF (EN)

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