Technical rule [Pre-order]

IEC/TR 63258
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Title (German)

Nanotechnologien - Ein Leitfaden zur Bestimmung der Dicke nanoskaliger Filme mit Hilfe von Ellipsometrie

Responsible national committee

DKE/K 141 - Nanotechnologie 

Responsible international committee

ISO/TC 229/JWG 2 - Measurement and characterization 

Edition 2021-03
Original language English
Price from 49.30 €
Table of contents


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