DIN IEC/TS 62622; DIN SPEC 42622:2014-09
Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings (IEC/TS 62622:2012)
Nanotechnologien - Beschreibung, Messung und dimensionale Qualitätsparameter von künstlichen Gittern (IEC/TS 62622:2012)
This Technical Specification specifies a generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features. The document also provides guidance on the categorization of measurement and evaluation methods for the determination of these parameters. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings. The responsible committee is DKE/K 141 "Nanotechnologie" ("Nanotechnology") of the DKE (German Commission for Electrical, Electronic and Information Technologies) at DIN and VDE.