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ISO/DIS 4508

Surface chemical analysis - Scanning probe microscopy - Guideline for the method and procedure for determining the temperature effects on AFM dimensional measurements

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ISO/TC 201/SC 9

Scanning probe microscopy

Committees

NA 062-08-16 AA

Surface chemical analysis and scanning probe microscopy

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DIN ISO 18115-1

Surface chemical analysis - Vocabulary - Part 1: General terms and terms used in spectroscopy (ISO 18115-1:2023)

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