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ISO/CD 25141
Atomic layer deposition of alumina coatings for silicon solar cell - requirements and test methods
ISO/CD 25142
Area selective atomic layer deposition - Specification and test methods
ISO/WD 25892
Powder coating by atomic layer deposition - Specification and test methods
ISO/TC 107/WG 5
Atomic layer deposition
ISO/TC 107/SC 9
Physical vapor deposition coatings
NA 134-02-01-08 UA
Environmental meteorology - Deposition parameters
NA 134-02-01-58 UA
Deposition of substances FFH
NA 134-04-02-10 UA
Measurement of atmospheric depositions and elements in ambient air
ISO/DIS 25164
Physical vapor deposition coatings - Magnetron sputtering deposition of TiAlSiN thin films - Specification
ISO/FDIS 19383
Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors
