NA 041
DIN Standards Committee Heating and Ventilation Technology and their Safety
Standards
[CURRENT]
DIN 50455-1
DIN 50455-1
Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods
Title (German)
Prüfung von Materialien für die Halbleitertechnologie - Verfahren zur Charakterisierung von Fotolacken - Teil 1: Bestimmung der Schichtdicke mit optischen Messverfahren
Document: references other documents
Responsible national committee
NA 062-10-103 AA - Testing of process materials for semiconductor technology
