Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)
Abstract
This document specifies a test method for the determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS). The method is applicable to mass fractions of elements from 10 ng/kg to 1000 ng/kg.
Begin
2022-10-20
Planned document number
DIN 50451-4
Project number
06236391
Responsible national committee
NA 062-02-21 AA - Testing of process materials for semiconductor technology
draft standard
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)
2024-01
Order from DIN Media
