NA 062
DIN Standards Committee Materials Testing
Draft standard
[Withdrawn]
DIN 50453-1
DIN 50453-1
Testing of materials for semiconductor technology - Determination of etch rates of etching mixtures - Part 1: Silicium monocrystals, gravimetric method
Title (German)
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung der Ätzraten von Ätzmischungen - Teil 1: Silicium-Einkristalle, Gravimetrisches Verfahren
Responsible national committee
NA 062-02-21 AA - Testing of process materials for semiconductor technology
