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NA 062

DIN Standards Committee Materials Testing

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Draft standard [Withdrawn]

DIN 50450-9
Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C₁-C₃-hydrocarbons in gaseous hydrogen chloride by gaschromatography

Title (German)

Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Verunreinigungen in Träger- und Dotiergasen - Teil 9: Bestimmung von Sauerstoff, Stickstoff, Kohlenstoffmonooxid, Kohlenstoffdioxid, Wasserstoff und C₁-C₃-Kohlenwasserstoffen in Chlorwasserstoff mit Gaschromatographie

Responsible national committee

NA 062-05-73 AA - Gas analysis and gas quality  

Edition 2020-11
Original language German
Price from 42.10 €
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Table of contents

Contact

Dipl.-Ing.

Florian Rieger

Am DIN-Platz, Burggrafenstr. 6
10787 Berlin

Tel.: +49 30 2601-2598
Fax: +49 30 2601-42598

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